Head unit, a droplet ejection apparatus, a method of manufacturing a panel from a base, an image display apparatus and an electronic apparatus

ABSTRACT

A head unit  103  for use in a droplet ejection apparatus is provided with a plurality of droplet ejection heads for ejecting one or more kind of liquid material of a predetermined color onto a base in the form of droplets. Each of the droplet ejection heads includes at least one nozzle array constituted from a plurality of nozzles linearly aligned. The liquid material is adapted to be ejected through the plurality of nozzles of the plurality of droplet ejection heads in the form of droplets. The plurality of droplet ejection heads for ejecting the liquid material of the same color are arranged so that the nozzle arrays of the plurality of droplet ejection heads are parallel to each other in a first direction and each of the plurality of droplet ejection heads partially overlaps at least one of the other droplet ejection heads when viewed from a second direction perpendicular to the first direction. All the plurality of droplet ejection heads for ejecting the liquid material of the same color which are partially overlapped each other eject the liquid material onto a predetermined region of the base in the form of droplets.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to Japanese Patent Application No.2004-289903 filed Oct. 1, 2004, which is hereby expressly incorporatedby reference herein in its entirety.

FIELD OF THE INVENTION

The present invention relates to a head unit for use in a dropletejection apparatus, a droplet ejection apparatus, a method ofmanufacturing a panel from a base, an image display apparatus and anelectronic apparatus.

BACKGROUND OF THE INVENTION

As a method of manufacturing a panel for an image display apparatus suchas a color filter of a liquid crystal display, a method using a dropletejection apparatus (ink jet drawing apparatus) is known (for example,see JP-A-59-75205). In this method, a plurality of pixels are formed ona substrate for manufacturing a panel on which a plurality of pixels(ejection regions) are formed by supplying a liquid material such as inkonto the plurality of pixels in the form of droplets using the dropletejection apparatus. Such a droplet ejection apparatus for manufacturinga panel supplies the liquid material for forming pixels onto theplurality of pixels on the substrate by ejecting the liquid material inthe form of droplets onto the substrate while mutually moving a stagefor supporting the substrate with respect to a head unit on which aplurality of droplet ejection heads are provided.

A plurality of nozzles (nozzle openings) are formed in one dropletejection head so as to be aligned, and the plurality of nozzlesconstitute a nozzle array. Since the length of the nozzle array isshorter than the size of the substrate, the plurality of dropletejection heads are arranged on the head unit so that the nozzle arraysthereof connect each other when viewed from a scanning direction inorder to make a width of a region on which droplets are ejected at onescanning operation of the head unit (a width to be drawn) longer.

However, since it is inevitable that some variations in the amount ofejection among the plurality of droplet ejection heads occur, forexample, color of pixels onto which one droplet ejection head ejectsdroplets of the liquid material may become deep, and color of pixelsonto which another droplet ejection head ejects droplets of the liquidmaterial may become light. In such a case, there is a problem that colorheterogeneity is generated in the panel.

SUMMARY OF THE INVENTION

It is therefore an object of the invention to provide a head unit foruse in a droplet ejection apparatus, a droplet ejection apparatus whichcan manufacture a high-quality panel that has no color heterogeneity, amethod of manufacturing a panel from a base, an image display apparatusand an electronic apparatus provided with a panel that has no colorheterogeneity.

In order to achieve the above object, in one aspect of the invention,the invention is directed to a head unit for use in a droplet ejectionapparatus. The head unit is provided with a plurality of dropletejection heads for ejecting one or more kind of liquid material of apredetermined color onto a base in the form of droplets. Each of thedroplet ejection heads includes at least one nozzle array constitutedfrom a plurality of nozzles linearly aligned. The liquid material isadapted to be ejected through the plurality of nozzles of the pluralityof droplet ejection heads in the form of droplets. The plurality ofdroplet ejection heads for ejecting the liquid material of the samecolor are arranged so that the nozzle arrays of the plurality of dropletejection heads are parallel to each other in a first direction and eachof the plurality of droplet ejection heads partially overlaps at leastone of the other droplet ejection heads when viewed from a seconddirection perpendicular to the first direction. All the plurality ofdroplet ejection heads for ejecting the liquid material of the samecolor which are partially overlapped each other eject the liquidmaterial onto a predetermined region of the base in the form ofdroplets.

According to the head unit for use in a droplet ejection apparatus ofthe invention, it is possible to eject the droplets of the liquidmaterial through the nozzles of the plurality of droplet ejection headsonto one ejection region (that is, one pixel) using an overlap of thenozzle arrays. Therefore, even in the case where there is a variation(error) among the amounts of ejection of the plurality of dropletejection heads, it is possible to prevent harmful color heterogeneityfrom being generated in a surface of a panel to be manufactured from thebase using the head unit of the invention. In other words, in contrastto the invention, in the case where a liquid material is supplied ontoone ejection region through nozzles of only one droplet ejection head,variations of the amounts of ejection of the droplet ejection heads leaddirectly to a variation (error) of the amount of liquid material to besupplied onto each of the ejection regions, whereby color heterogeneityappears in the panel strongly. On the other hand, in the invention,since the amount of liquid material to be supplied onto one ejectionregion becomes the average of the amounts of ejection of the pluralityof droplet ejection heads overlapped in a scanning direction, it ispossible to uniformize the amount of liquid material supplied onto eachof the ejection regions, whereby it is possible to prevent the colorheterogeneity from being generated.

Further, by arranging the plurality of droplet ejection heads so thatthe nozzle arrays of the plurality of droplet ejection heads areparallel to each other in a first direction and each of the plurality ofdroplet ejection heads partially overlaps at least one of the otherdroplet ejection heads when viewed from a second direction perpendicularto the first direction, the head unit of the invention has the followingadvantages.

The droplet ejection heads normally tend to vary the amount of ejectionof each of the nozzles up and down along the nozzle array mutuallybecause of the configuration thereof. For example, there is a case wherethe amount of ejection in one nozzle in the vicinity of the center ofthe nozzle array is relatively smaller, and the nearer both ends of thenozzle array, the more the amount of ejection in one nozzle becomes. Insuch a case, in contrast to the head unit of the invention, in the casewhere the plurality of droplet ejection heads for ejecting the liquidmaterial in the form of droplets onto one ejection region (that is, onepixel) are aligned, variations of the amounts of ejection of each nozzlealong the nozzle arrays in the plurality of droplet ejection heads leaddirectly to a variation (error) of the amount of liquid material to besupplied onto each of the ejection regions, whereby color heterogeneitystrongly appears in the panel to be manufactured.

On the other hand, in the invention, since the head unit has theconfiguration described above, the position of one nozzle through whicha droplet is ejected onto one ejection region in the plurality ofnozzles of the nozzle array of one droplet ejection head is differentfrom the position of one nozzle through which a droplet is ejected ontothe one ejection region in the plurality of nozzles of the nozzle arrayof other droplet ejection head. Thus, the amount of ejection of such onenozzle in the one droplet ejection head tends to differ from the amountof ejection of such one nozzle in the other droplet ejection head. Theamount of the liquid material to be supplied onto the one ejectionregion becomes the average of the amount of ejection of thecorresponding nozzle in the plurality of droplet ejection heads.Therefore, in the invention, it is possible to compensate for thevariation in the amount of ejection of each nozzle along the nozzlearray by averaging the amounts of ejection, and this makes it possibleto uniformize the amount of liquid material supplied onto each of theejection regions, whereby it is possible to prevent the harmful colorheterogeneity from being generated in a surface of a panel to bemanufactured more surely.

In the head unit of the invention, it is preferable that the one or morekind of liquid material includes three kinds of liquid materials whichrespectively have red, green and blue colors.

In another aspect of the invention, the invention is directed to adroplet ejection apparatus for supplying one or more kind of liquidmaterial onto a base in the form of droplets. The one or more kind ofliquid material has a predetermined color. The apparatus includes:

the head unit defined by claim 1;

a stage having two major surfaces, one of the two major surfaces of thestage facing the plurality of droplet ejection heads of the head unit,and the base being supported on the one major surface of the stage;

a moving mechanism for mutually moving the stage with respect to thehead unit; and

a control unit for controlling operation of the head unit and the movingmechanism so that each of the plurality of the droplet ejection heads ofthe head unit ejects droplets of the liquid material onto the base whilemutually moving the stage with respect to the head unit in the seconddirection perpendicular to the first direction.

According to the droplet ejection apparatus of the invention, it ispossible to eject the droplets of the liquid material through thenozzles of the plurality of droplet ejection heads onto one ejectionregion (that is, one pixel) using an overlap of the nozzle arrays.Therefore, even in the case where there is a variation (error) among theamounts of ejection of the plurality of droplet ejection heads, it ispossible to prevent harmful color heterogeneity from being generated ina surface of a panel to be manufactured from the base using the headunit of the invention. In other words, in contrast to the invention, inthe case where a liquid material is supplied onto one ejection regionthrough a nozzle of only one droplet ejection head, variations of theamounts of ejection of the droplet ejection heads lead directly to avariation (error) of the amount of liquid material to be supplied ontoeach of the ejection regions, whereby color heterogeneity appears in thepanel strongly. On the other hand, in the invention, since the amount ofliquid material to be supplied onto one ejection region becomes theaverage of the amounts of ejection of the plurality of droplet ejectionheads overlapped in a scanning direction, it is possible to uniformizethe amount of liquid material supplied onto each of the ejectionregions, whereby it is possible to prevent the color heterogeneity frombeing generated.

In the droplet ejection apparatus of the invention, it is preferablethat the base is a base material for manufacturing a color filtersubstrate for a liquid-crystal display, and the one or more kind ofliquid material is ink for forming a filter layer of the color filtersubstrate.

This makes it possible to manufacture the color filter substrate for aliquid-crystal display having no harmful color heterogeneity and streakwith high productivity (manufacturing efficiency).

In the droplet ejection apparatus of the invention, it is preferablethat the base is a base material for manufacturing anelectroluminescence display, and the one or more kind of liquid materialincludes a luminescent material for manufacturing theelectroluminescence display.

This makes it possible to manufacture an electroluminescence displayhaving no harmful color heterogeneity and streak with high productivity(manufacturing efficiency).

In yet another aspect of the invention, the invention is directed to amethod of manufacturing a panel from a base using the droplet ejectionapparatus described above. The method includes the steps of:

preparing a base; and

supplying one or more kind of liquid material of a predetermined coloronto the base in the form of droplets by ejecting the droplets by meansof the droplet ejection apparatus while mutually moving the base withrespect to the head unit in the second direction perpendicular to thefirst direction.

According to the method of manufacturing a panel from a base using thedroplet ejection apparatus of the invention, it is possible to eject thedroplets of the liquid material through the nozzles of the plurality ofdroplet ejection heads onto one ejection region (that is, one pixel)using an overlap of the nozzle arrays. Therefore, even in the case wherethere is a variation (error) among the amounts of ejection of theplurality of droplet ejection heads, it is possible to prevent harmfulcolor heterogeneity from being generated in a surface of a panel to bemanufactured from the base using the head unit of the invention. Inother words, in contrast to the invention, in the case where a liquidmaterial is supplied onto one ejection region through a nozzle of onlyone droplet ejection head, variations of the amounts of ejection of thedroplet ejection heads lead directly to a variation (error) of theamount of liquid material to be supplied onto each of the ejectionregions, whereby color heterogeneity appears in the panel strongly. Onthe other hand, in the invention, since the amount of liquid material tobe supplied onto one ejection region becomes the average of the amountsof ejection of the plurality of droplet ejection heads overlapped in ascanning direction, it is possible to uniformize the amount of liquidmaterial supplied onto each of the ejection regions, whereby it ispossible to prevent the color heterogeneity from being generated.

Further, by arranging the plurality of droplet ejection heads so thatthe nozzle arrays of the plurality of droplet ejection heads areparallel to each other in a first direction and each of the plurality ofdroplet ejection heads partially overlaps at least one of the otherdroplet ejection heads when viewed from a second direction perpendicularto the first direction, the head unit of the invention has the followingadvantages.

The droplet ejection heads normally tend to vary the amount of ejectionof each of the nozzles up and down along the nozzle array mutuallybecause of the configuration thereof. For example, there is a case wherethe amount of ejection in one nozzle in the vicinity of the center ofthe nozzle array is relatively smaller, and the nearer both ends of thenozzle array, the more the amount of ejection in one nozzle becomes. Insuch a case, in contrast to the head unit of the invention, in the casewhere the plurality of droplet ejection heads for ejecting the liquidmaterial in the form of droplets onto one ejection region (that is, onepixel) are aligned, variations of the amounts of ejection of each nozzlealong the nozzle arrays in the plurality of droplet ejection heads leaddirectly to a variation (error) of the amount of liquid material to besupplied onto each of the ejection regions, whereby color heterogeneitystrongly appears in the panel to be manufactured.

On the other hand, in the invention, since the head unit has theconfiguration described above, the position of one nozzle through whicha droplet is ejected onto one ejection region in the plurality ofnozzles of the nozzle array of one droplet ejection head is differentfrom the position of one nozzle through which a droplet is ejected ontothe one ejection region in the plurality of nozzles of the nozzle arrayof other droplet ejection head. Thus, the amount of ejection of such onenozzle in the one droplet ejection head tends to differ from the amountof ejection of such one nozzle in the other droplet ejection head. Theamount of the liquid material to be supplied onto the one ejectionregion becomes the average of the amount of ejection of thecorresponding nozzle in the plurality of droplet ejection heads.Therefore, in the invention, it is possible to compensate for thevariation in the amount of ejection of each nozzle along the nozzlearray by averaging the amounts of ejection, and this makes it possibleto uniformize the amount of liquid material supplied onto each of theejection regions, whereby it is possible to prevent the harmful colorheterogeneity from being generated in a surface of a panel to bemanufactured more surely.

In the method of manufacturing a panel from a base according to theinvention, it is preferable that the base is a base material formanufacturing a color filter substrate for a liquid-crystal display, andthe one or more kind of liquid material is ink for forming a filterlayer of the color filter substrate.

This makes it possible to manufacture the color filter substrate for aliquid-crystal display having no harmful color heterogeneity with highproductivity (manufacturing efficiency).

In the method of manufacturing a panel from a base according to theinvention, it is preferable that the base is a base material formanufacturing an electroluminescence display, and the one or more kindof liquid material includes a luminescent material for manufacturing theelectroluminescence display.

This makes it possible to manufacture an electroluminescence displayhaving no harmful color heterogeneity with high productivity(manufacturing efficiency).

In still another aspect of the invention, the invention is directed toan image display apparatus including the panel manufactured using themethod described above.

This makes it possible to manufacture the image display apparatus havingno harmful color heterogeneity with high productivity (manufacturingefficiency).

In yet still another aspect of the invention, the invention is directedto an electronic apparatus including the image display apparatusdescribed above.

This makes it possible to manufacture the electronic apparatus includingthe image display apparatus having no harmful color heterogeneity withhigh productivity (manufacturing efficiency).

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, features and advantages of theinvention will become more readily apparent from the following detaileddescription of preferred embodiment of the invention which proceeds withreference to the accompanying drawings.

FIG. 1 is a perspective view of a droplet ejection apparatus in anembodiment of the invention.

FIG. 2 is a plan view which shows a head unit of the droplet ejectionapparatus shown in FIG. 1 and a base.

FIG. 3 is an enlarged plan view which shows a part of a nozzle surface(nozzle plate) of the droplet ejection heads and pixels of the base.

FIGS. 4( a) and 4(b) are respectively a perspective cross-sectional viewand a cross sectional view of the droplet ejection head of the dropletejection apparatus shown in FIG. 1.

FIG. 5 is a block diagram of the droplet ejection apparatus shown inFIG. 1.

FIG. 6( a) is a schematic view of a head driving unit.

FIG. 6( b) is a timing chart which shows a driving signal, a selectingsignal and an ejection signal for the head driving unit.

FIG. 7 is a schematic cross-sectional view which shows a method ofmanufacturing a color filter substrate.

FIG. 8 is a schematic plan view which for explaining the positionalrelation of each of the droplet ejection heads in the head unit of thedroplet ejection apparatus according to the invention.

FIG. 9 is a plan view which schematically shows another example of theconfiguration of the head unit in the droplet ejection-apparatus of theinvention.

FIG. 10 is a schematic cross-sectional view which shows a method ofmanufacturing an organic electroluminescence display.

FIG. 11 is a perspective view which shows a structure of a mobile (orlaptop type) personal computer to which an electronic apparatus of theinvention is applied.

FIG. 12 is a perspective view which shows a structure of a portablephone (including a personal handy phone system) to which an electronicapparatus of the invention is applied.

FIG. 13 is a perspective view which shows a structure of a digital stillcamera to which an electronic apparatus of the invention is applied.

DETAILED DESCRIPTION OF THE INVENTION

Preferred embodiment of a head unit, a droplet ejection apparatus, amethod of manufacturing a panel from a base, an image display apparatusand an electronic apparatus according to the invention will now bedescribed in detail with reference to the appending drawings.

In the present embodiment, the case of manufacturing a color filtersubstrate 10 that is to become a component of a liquid crystal displayas one example of a panel will be described typically.

(Entire Configuration of Droplet Ejection Apparatus)

FIG. 1 is a perspective view of a droplet ejection apparatus 1 in anembodiment of the invention. As shown in FIG. 1, the droplet ejectionapparatus 1 is provided with a head unit 103 in which a plurality ofdroplet ejection heads 2 are mounted on a carriage 105; a carriagemoving mechanism (moving mechanism) 104 for moving the head unit 103 inone horizontal direction (hereinafter, referred to as an “X axisdirection”); a stage 106 for supporting a base 10A described later; astage moving mechanism (moving mechanism) 108 for moving the stage 106in a horizontal direction perpendicular to the X axis direction(hereinafter, referred to as a “Y axis direction”); and a control unit112 for controlling the head unit 103, the carriage moving mechanism 104and the stage moving mechanism 108.

Further, three tanks 101 are provided for respectively storing threekinds of liquid materials 111 including red (R), green (G) and blue (B)in the vicinity of the droplet ejection apparatus 1. Each of the tanks101 is connected to the head unit 103 via a tube 110 functioning as aflow path for sending the liquid materials 111. The liquid material 111stored in each of the tanks 101 is sent (supplied) to each of thedroplet ejection heads 2 in the head unit 103.

In this regard, the “liquid material” in the invention includes amaterial used for forming pixels of a panel, and means a material havingenough degree of viscosity to be ejected through the nozzle 25 of thedroplet ejection head 2. In this case, the material may be eitherwater-based or oil-based. Further, the material needs only haveejectable fluidity (degree of viscosity) through the nozzle 25 of thedroplet ejection head 2. Even though a solid material may be dispersedinto the material, the material may be fluid as a whole. The liquidmaterials 111 in the present embodiment are organic solvent inks inwhich pigments for forming a filter layer of pixels of a color filtersubstrate 10 are dissolved or dispersed in an organic solvent.

In this regard, in the following description, in the case ofdistinguishing the liquid materials 111 of red, green and blue, they arerespectively referred to as the “liquid materials 111R, 111G and 111B”.On the other hand, in the case of generally naming them withoutdistinguishing the colors, each of them is referred to simply as the“liquid material 111”.

The operation of the carriage moving mechanism 104 is controlled by thecontrol unit 112. The carriage moving mechanism 104 in the presentembodiment has a function of adjusting the height of the head unit 103by moving the head unit 103 along a vertical direction (hereinafter,referred to as a “Z axis direction”). Further, the carriage movingmechanism 104 also has a function of rotating the head unit 103 aroundan axis parallel to the Z axis direction, and this makes it possible tofine adjust the angle of the head unit 103 around the Z axis.

The stage 106 has a plane parallel to both the X axis direction and theY axis direction. Further, the stage 106 is constructed so that the base10A used for manufacturing a color filter substrate 10 can be fixed orheld (or supported) thereon. The stage moving mechanism 108 moves thestage 106 along the Y axis direction perpendicular to both the X axisdirection and the Z axis direction. The operation of the stage movingmechanism 108 is controlled by the control unit 112. Further, the stagemoving mechanism 108 in the present embodiment also has a function ofrotating the stage 106 around an axis parallel to the Z axis direction,and this makes it possible to correct the position of the base 10A byfine adjusting the slant of the base 10A mounted on the stage 106 aroundthe Z axis direction so that the base 10A becomes straight with respectto the head unit 103.

As described above, the head unit 103 is moved to the X axis directionby means of the carriage moving mechanism 104. On the other hand, thestage 106 is moved to the Y axis direction by means of the stage movingmechanism 108. Therefore, a mutual position of the head unit 103 withrespect to the stage 106 can be changed by the carriage moving mechanism104 and the stage moving mechanism 108.

In this regard, the detailed construction and function of the controlunit 112 will be described later.

(Head Unit)

FIG. 2 is a plan view which shows the head unit 103 of the dropletejection apparatus 1 shown in FIG. 1 and the base 10A. The head unit 103shown in FIG. 2 has a structure in which the plurality of dropletejection heads 2 are mounted on the carriage 105. The carriage 105 isshown in FIG. 2 with a chain double-dashed line. Further, solid lineswhich respectively show the plurality of droplet ejection heads 2indicate the positions of nozzle surfaces (that is, nozzle plates 128described later) of the plurality of droplet ejection heads 2.

Four droplet ejection heads 2 for ejecting the liquid material 111R ofred, four droplet ejection heads 2 for ejecting the liquid material 111Gof green and four droplet ejection heads 2 for ejecting the liquidmaterial 111B of blue are provided on the head unit 103. The fourdroplet ejection heads 2 for ejecting the liquid material 111R of redinclude a first droplet ejection head 21R, a second droplet ejectionhead 22R, a third droplet ejection head 23R and droplet ejection head24R. The four droplet ejection heads 2 for ejecting the liquid material111G of green include a first droplet ejection head 21G, a seconddroplet ejection head 22G, a third droplet ejection head 23G and dropletejection head 24G. The four droplet ejection heads 2 for ejecting theliquid material 111B of blue include a first droplet ejection head 21B,a second droplet ejection head 22B, a third droplet ejection head 23Band droplet ejection head 24B.

In the following description, in the case of generally naming thesedroplet ejection heads 2 without distinguishing them by the colors ofthe liquid materials to be ejected, each of them is referred to simplyas the “droplet ejection head 2”. On the other hand, in the case ofdistinguishing the droplet ejection heads 2 for ejecting the liquidmaterials 111 of red, green and blue, they are referred to as, forexample, “the first droplet ejection head 21R, the second dropletejection head 22R, . . . ”.

The base 10A shown in FIG. 2 is a base material for manufacturing acolor filter substrate 10 for a liquid-crystal display on which colorfilters are arranged in a stripe manner. A plurality of red pixels(ejection regions) 18R, a plurality of green pixels (ejection regions)18G and a plurality of blue pixels (ejection regions) 18B are providedon the base 0A. The droplet ejection apparatus 1 operates so that theliquid material 111R of red is supplied onto each of the pixels 18R, theliquid material 111G of green is supplied onto each of the pixels 18G,and the liquid material 111B of blue is supplied onto each of the pixels18B.

Each of the pixels 18R, 18G and 18B has a substantially rectangularshape. The base 10A is supported on the stage 106 with the posture inwhich the long axis direction of each of the pixels 18R, 18G and 18B isparallel to the X axis direction and the short axis direction of each ofthe pixels 18R, 18G and 18B is parallel to the Y axis direction. Theplurality of pixels 18R, 18G and 18B are arranged on the base 10A so asto be repeatedly arranged in this order along the Y axis direction, andso that the pixels of the same color are arranged along the X axisdirection. A set of pixels 18R, 18G and 18B arranged in the Y axisdirection correspond to one picture element of the color filtersubstrate 10 to be manufactured.

(Droplet Ejection Head)

FIG. 3 is an enlarged plan view which shows a part of a nozzle surface(nozzle plate 128) of the droplet ejection heads 2 and the pixels of thebase 10A. In this regard, although the nozzle surface of each of thedroplet ejection heads 2 is provided so as to face the base 10A, thatis, in a vertical direction, for facilitation of visualization, FIG. 3shows the nozzle surface of each of the droplet ejection heads 2 with asolid line. A plurality of nozzles (nozzle holes) 25 are formed on thenozzle surface of each of the droplet ejection heads 2 so as to belinearly aligned along the X axis direction at even intervals. Theplurality of nozzles 25 in each of the droplet ejection heads 2constitute at least one nozzle array. In the present embodiment, twonozzle arrays are formed on each of the droplet ejection heads 2 in aparallel manner so as to be shifted with a half pitch with respect toeach other. However, the invention is not limited thereto. The number ofnozzle arrays that one droplet ejection head 2 has may be one, or threeor more. Further, the number of nozzles 25 that are formed on onedroplet ejection head 2 is not particularly limited, and it may normallybe in the range of about several dozens to several hundreds.

FIGS. 4( a) and 4(b) are respectively a perspective cross-sectional viewand a cross sectional view of the droplet ejection head 2 of the dropletejection apparatus 1 shown in FIG. 1. As shown in FIGS. 4( a) and 4(b),each of the droplet ejection heads 2 constitutes an ink Jet head. Morespecifically, the droplet ejection head 2 is provided with a diaphragmplate 126 and a nozzle plate 128. A reservoir 129 is positioned betweenthe diaphragm plate 126 and the nozzle plate 128. The reservoir 129fulfills with the liquid material 111 supplied from the tank 101 via anink intake port 131.

A plurality of dividing walls 122 are positioned between the diaphragmplate 126 and the nozzle plate 128. A cavity 120 is defined by thediaphragm plate 126, the nozzle plate 128 and a pair of dividing walls122. Since the cavity 120 is provided in accordance with one nozzle 25,the number of cavities 120 is the same as the number of nozzles 25. Theliquid material 111 is supplied to the cavity 120 via an ink supply port130 provided between the pair of dividing walls 122.

A vibrator 124 as a driving element is positioned on the diaphragm plate126 in accordance with each of the cavities 120. The vibrator 124changes liquid pressure of the liquid material 111 fulfilled within thecavity 120, and includes a piezoelectric element 124C, and a pair ofelectrodes 124A and 124B between which the piezoelectric element 124C issandwiched. By applying a driving voltage signal between the pair ofelectrodes 124A and 124B, the piezoelectric element 124C deforms tochange the liquid pressure of the liquid material 111 fulfilled withinthe cavity 120, thereby ejecting the liquid material 111 in the form ofdroplets through the corresponding nozzle 25. The shape of each of thenozzles 25 is adjusted so that the liquid material 111 is ejected in theZ axis direction through each nozzle 25.

The control unit 112 shown in FIG. 1 may be constructed to apply adriving voltage signal to each of the plurality of vibrators 124independently from each other. In other words, a volume of the liquidmaterial 111 to be ejected through each of the nozzles 25 may becontrolled in accordance with the driving voltage signal from thecontrol unit 112 with reference to each nozzle 25.

In this regard, the droplet ejection head 2 is not limited to one whichuses a piezoelectric actuator as shown in FIG.4 as a driving element.For example, the droplet ejection head 2 may use an electrostaticactuator, or may have a structure in which the liquid material 111 isejected in the form of droplets using thermal expansion of the liquidmaterial 111 (film boiling) by means of an electro-thermal convertingelement.

(Control Unit)

Next, the configuration of the control unit 112 will be now described.FIG. 5 is a block diagram of the droplet ejection apparatus 1 shown inFIG. 1 which includes the control unit 112. As shown in FIG. 5, thecontrol unit 112 is provided with an input buffer memory 200, a storageunit 202, a processing unit 204, a scan driving unit 206, a head drivingunit 208, a carriage position detecting device 302, and a stage positiondetecting device 303.

The processing unit 204 is electrically connected to each of the inputbuffer memory 200, the storage unit 202, the scan driving unit 206, thehead driving unit 208, the carriage position detecting device 302 andthe stage position detecting device 303. Further, the scan driving unit206 is electrically connected to both the carriage moving mechanism 104and the stage moving mechanism 108. Similarly, the head driving unit 208is electrically connected to each of the plurality of droplet ejectionheads 2 in the head unit 103.

The input buffer memory 200 receives data on positions to be ejected fordroplets of the liquid material 111, that is, drawing pattern data froman outer information processing apparatus. The input buffer memory 200outputs the drawing pattern data to the processing unit 204, and theprocessing unit 204 then stores the drawing pattern data in the storageunit 202. In this regard, the storage unit 202 shown in FIG. 5 isconstituted from a RAM (Random Access Memory), magnetic recording media,magneto-optic recording media or the like.

The carriage position detecting device 302 detects the position of thecarriage 105, that is, the head unit 103 in the X axis direction (movingdistance of the carriage 105 in the X axis direction), and outputs thedetected signal into the processing unit 204. The carriage positiondetecting device 302 and the stage position detecting device 303 areconstituted from a linear encoder, a laser length measuring device orthe like, for example.

The processing unit 204 controls the operation of the carriage movingmechanism 104 and the stage moving mechanism 108 via the scan drivingunit 206 on the basis of the detected signals of both the carriageposition detecting device 302 and the stage position detecting device303, thereby controlling the position of the head unit 103 and theposition of the base 10A. Further, the processing unit 204 controls themoving velocity of the stage 106, that is, the base 10A by controllingthe operation of the stage moving mechanism 108.

Moreover, the processing unit 204 outputs a selection signal SC forspecifying ON/OFF of each of the nozzles 25 in each ejection timing tothe head driving unit 208 on the basis of the drawing pattern datastored in the storage unit 202. The head driving unit 208 then outputsan ejection signal required to eject the liquid material 111 to each ofthe droplet ejection heads 2 on the basis of the selection signal SC. Asa result, the liquid material 111 is ejected in the form of dropletsthrough the corresponding nozzles 25 in each of the droplet ejectionheads 2.

The control unit 112 may be a computer provided with a CPU (centralprocessing unit), a ROM (read only memory), a RAM and the like. In thiscase, the operation of the control unit 112 described above may berealized using software program that the computer can carry out.Alternatively, the control unit 112 may be realized with a dedicatedcircuit (that is, using hardware).

Next, the configuration and function of the head driving unit 208 in thecontrol unit 112 will be described. FIG. 6( a) is a schematic view ofthe head driving unit 208. FIG. 6( b) is a timing chart which shows adriving signal, a selecting signal and an ejection signal for the headdriving unit 208. As shown in FIG. 6( a), the head driving unit 208includes one driving signal generator 203, and a plurality of analogswitches AS. As shown in FIG. 6( b), the driving signal generator 203generates a driving signal DS. Potential of the driving signal DS istemporally changed with respect to a reference potential L. Morespecifically, the driving signal DS includes a plurality of ejectionwaveforms P that repeat with the ejection cycle EP. In this regard, theejection waveform P corresponds to a driving voltage waveform to beapplied between the pair of electrodes 124A and 124B in thecorresponding vibrator 124 in order to eject one droplet through onenozzle 25.

The driving signal DS is supplied to an input terminal of each of theanalog switches AS. Each of the analog switches AS is provided inaccordance with each of the nozzles 25. Namely, the number of analogswitches AS is the same as the number of nozzles 25.

The processing unit 204 outputs the selection signal SC for indicatingON/OFF of each of the nozzles 25 to each of the analog switches AS. Inthis regard, the selection signal SC can become either a high levelstate or a low level state with respect to each of the analog switchesAS. In response to the driving signal DS and the selection signal SC,each of the analog switches AS applies an ejection signal ES to theelectrode 124A of the corresponding vibrator 124. More specifically, inthe case where the selection signal SC becomes the high level state, thecorresponding analog switch AS is turned ON, and applies the drivingsignal DS as the ejection signal ES to the corresponding electrode 124A.On the other hand, in the case where the selection signal SC becomes thelow level state, the corresponding analog switch AS is turned OFF, andthe potential of the ejection signal ES that the corresponding analogswitch AS outputs to the corresponding electrode 124A becomes areference potential L. When the driving signal DS is applied to theelectrode 124A of the vibrator 124, the liquid material 111 is ejectedthrough the nozzle 25 that corresponds to the vibrator 124. In thisregard, the reference potential L is applied to the electrode 124B ofeach of the vibrators 124.

In an example shown in FIG. 6( b), a high level period and a low levelperiod of each of two selection signals SC are set so that the ejectionwaveform P appears with a cycle 2EP that is twice the ejection cycle EPin each of two ejection signals ES. Thus, the liquid material 111 isejected in the form of droplets through each of the two correspondingnozzles 25 with the cycle 2EP. A common driving signal DS is applied toeach of the vibrators 124 that correspond to the two nozzles 25 from ashared driving signal generator 203. For this reason, the liquidmaterial 111 is ejected through the two nozzles 25 at substantially sametiming.

Such a droplet ejection apparatus 1 operates so that droplets of theliquid materials 111 are ejected through the nozzles 25 of each of thedroplet ejection heads 2 in the head unit 103 and supplied (landed) ontoeach of the pixels 18R, 18G and 18B on the base 10A while moving thebase 10A supported on the stage 106 in the Y axis direction by theoperation of the stage moving mechanism 108, and passing the base 10Aunder the head unit 103. Hereinafter, this operation of the dropletejection apparatus 1 may be referred to as “main scanning movementbetween the head unit 103 and the base 10A”.

In the case where the width of the base 10A in the X axis direction issmaller than the length of the entire head unit 103 in the X axisdirection (that is, an entire ejection width W described later) to whichthe liquid materials 111 can be ejected with respect to the base 10A, itis possible to supply the liquid materials 111 onto the whole of thebase 10A by carrying out the main scanning movement between the headunit 103 and the base 10A once. On the other hand, in the case where thewidth of the base 10A in the X axis direction is larger than the entireejection width W of the head unit 103, it is possible to supply theliquid materials 111 onto the whole of the base 10A by repeatedlyalternating the main scanning movement between the head unit 103 and thebase 10A and the movement of the head unit 103 in the X axis directionby means of the operation of the carriage moving mechanism 104 (referredto as a “sub-scanning movement”).

Next, a method of manufacturing the color filter substrate 10 using thedroplet ejection apparatus 1 described above will now be described-indetail. FIG. 7 is a schematic cross-sectional view which shows a methodof manufacturing a color filter substrate 10. As shown in FIG. 7, thebase 10A includes a supporting substrate 12 having light permeability,and a plurality of pixels 18R, 18G and 18B each becoming a color element(pixel region) formed on the supporting substrate 12 so as to beseparated with black matrices 14 and banks 16. The black matrices 14 areformed from a material having light shielding effect. The black matrices14 and the banks 16 provided on the black matrices 14 are positioned onthe supporting substrate 12 so that a plurality of light permeatingportions, that is, a plurality of pixel 18R, 18G and 18B are defined bythem in a matrix manner. Namely, the plurality of pixels 18R, 18G and1(B are formed as partitions by the supporting substrate 12, the blackmatrices 14 and the banks 16. The pixel 18R is a region in which afilter layer 111FR into which only light having any wavelength within ared wavelength region permeates is to be formed. The pixel 18G is aregion in which a filter layer 111FG into which only light having anywavelength within a green wavelength region permeates is to be formed.The pixel 18B is a region in which a filter layer 111FB into which onlylight having any wavelength within a blue wavelength region permeates isto be formed.

A base 10A is manufactured in accordance with the following steps whenmanufacturing a color filter substrate 10. First, a metallic thin filmis formed on a supporting substrate 12 by means of a spattering methodor an evaporation method. Black matrices 14 are then formed in areticular pattern from the metallic thin film by means of aphotolithography method. Metal chromium and chromium oxide may bementioned as materials for the black matrices 14. In this regard, thesupporting substrate 12 is a substrate having light permeability withrespect to visible light (optical wavelength), such as a glasssubstrate. Subsequently, a resist layer constituted from negative typephotopolymer composition is applied so as to cover the supportingsubstrate 12 and the black matrices 14. The resist layer is exposedwhile making a mask film formed in a matrix pattern stick on the resistlayer. Then, banks 16 are obtained by removing the non-exposed portionsof the resist layer by means of an etching process. In this way, thebase 10A is obtained.

In this regard, banks formed from a resin black may be utilized in placeof the banks 16. In this case, no metallic thin film (that is, blackmatrices 14) is required, and the bank layer is constructed from onelayer.

Next, the base 10A is made to become lyophilic by means of an oxygenplasma process under atmospheric pressure. The surface of the supportingsubstrate 12, the surface of the black matrices 14, and the surface ofthe banks 16 in the concave portions (a part of the pixel), each ofwhich is defined by the supporting substrate 12, the black matrices 14and the banks 16, tend to take on lyophilic by this process. Further, aplasma process using CF₄ as a process gas is then carried out to thebase 10A. By the plasma process using CF₄, the surface of the banks 16in each of the concave portions is fluorinated, and the surface of thebanks 16 tends to take on non-lyophilic by this process. In this regard,by the plasma process using CF₄, the surface of the supporting substrate12 and the surface of the black matrices 14 that have taken on lyophiliclose lyophilic slightly. However, even so, these surfaces can maintainlyophilic. In this regard, in accordance with the material of thesupporting substrate 12, the material of the black matrices 14, and thematerial of the banks 16, the surface of each of the concave portionsmay take on desired lyophilic and non-lyophilic without the surfacetreatment described above. In such a case, it is no need for the surfaceto be subjected to the surface treatment described above.

The base 10A on which the pixels 18R, 18G and 18B were formed asdescribed above is transported onto the stage 106 of the dropletejection apparatus 1, and supported on the stage 106. The dropletejection apparatus 1 moves the base 10A in the Y axis direction byoperating the stage moving mechanism 108, and supplies the liquidmaterials in the form of droplets onto each of the pixels 18R, 18G and18B from each of the droplet ejection heads 2 while passing the base 10Aunder the head unit 103. At this time, as shown in FIGS. 7( a) to 7(c),the red liquid material 111R (color filter material) is ejected ontoeach of the pixels 18R, the green liquid material 111G (color filtermaterial) is ejected onto each of the pixels 18G, and the blue liquidmaterial 111B (color filter material) is ejected onto each of the pixels18B.

After respectively supplying the liquid materials 111R, 111G and 111Bonto each of the pixels 18R, 18G and 18B, the base 10A is transportedinto a drying apparatus (not shown in the drawings) to dry the liquidmaterials 111R, 111G and 111B respectively supplied into each of thepixels 18R, 18G and 18B. Thus, filter layers 111FR, 111FG and 111FB areformed on each of the pixels 18R, 18G and 18B, respectively. In thisregard, by repeatedly carrying out the supply of the liquid materials111R, 111G and 111B using the droplet ejection apparatus 1 and thedrying the supplied liquid materials 111R, 111G and 111B by means of thedrying apparatus to laminate the liquid materials 111R, 111G and 111Band the filter layers 111FR, 111FG and 11FB alternately, final filterlayers 111FR, 111FG and 111FB may be formed on each of the pixels 18R,18G and 18B.

The base 10A is then transported into an oven (not shown in thedrawings) and the filter layers 111FR, 111FG and 111FB are post-baked(that is, reheated) in this oven.

Next, the base 10A is transported into a protective film formingapparatus (not shown in the drawings) and a protective film (overcoating film) 20 is formed over the filter layers 111FR, 111FG, 111FBand the banks 16 in this protective film forming apparatus. After theprotective film 20 has been formed over the filter layers 111FR, 111FG,111FB and the banks 16, the protective film 20 is completely dried inthe drying apparatus. Further, the protective film 20 is heated in ahardening apparatus (not shown in the drawings) to be completelyhardened, by which the base 10A becomes a color filter substrate 10.

FIG. 8 is a schematic plan view which for explaining the positionalrelation of each of the droplet ejection heads 2 in the head unit 103 ofthe droplet ejection apparatus 1 according to the invention. Asdescribed above, the four droplet ejection heads 2 for ejecting the redliquid material 111R (including the first to fourth droplet ejectionheads 21R to 24R), the four droplet ejection heads 2 for ejecting thegreen liquid material 111G (including the first to fourth dropletejection heads 21G to 24G) and the four droplet ejection heads 2 forejecting the blue liquid material 111B (including the first to fourthdroplet ejection heads 21B to 24B) are provided on the head unit 103. Inthis regard, each of the lines shown in FIG. 8 indicates the position ofthe nozzle array in each of the droplet ejection heads 2.

It is normally difficult to control the amount of ejection of each ofthe nozzles 25 in the vicinity of both ends of the nozzle array in eachof the droplet ejection heads 2, by which an error of the amount ofejection of such nozzles is easily generated. For this reason, thedroplet ejection apparatus 1 in the present embodiment is constructed sothat the predetermined number (for example, about 10) of nozzles 25 inthe vicinity of the both ends of the nozzle array in each of the dropletejection heads 2 (hereinafter, such nozzles 25 may be referred to as“disable nozzles 25”) are not used (that is, the liquid material 111 isnot ejected through each of the disable nozzles 25). Thus, it ispossible to uniformize the amount of ejection of the liquid material 111in each of the nozzles 25, and this makes it possible to uniformize thecolor of each of the pixels 18R, 18G and 18B in the color filtersubstrate 10 to be manufactured. Therefore, it is possible to preventcolor heterogeneity from being generated more surely. In this regard,nonuse portions 26 provided at the both ends of the nozzle array in eachof the droplet ejection heads 2 shown in FIG. 8 indicate the regions inwhich the unable nozzles 25 are positioned.

Hereinafter, a description will be given for the positional relation ofthe four droplet ejection heads 2 including the first to fourth dropletejection heads 21R to 24R for ejecting the red liquid material 111R.

The first droplet ejection head 21R and the second droplet ejection head22R are arranged in a consecutive manner in a first direction (that is,X axis direction) parallel to each of the nozzle arrays, and the twonozzle arrays of the first and second droplet ejection heads 21R and 22Rare arranged so that the nozzles 25 thereof are consecutive via a seamr₁ between the two adjacent nozzle arrays of the first and seconddroplet ejection heads 21R and 22R when viewed from a second direction(that is, Y axis direction) perpendicular to each of the nozzle arrays(the first direction). In this case, the two nozzle arrays of the firstand second droplet ejection heads 21R and 22R function as a long nozzlearray. In other words, a nozzle pitch at the seam r₁ when viewed fromthe Y axis direction is set to become a regular length similar to anozzle pitch in the nozzle array. The head array constituted from thefirst and second droplet ejection heads 21R and 22R arranged with such apositional relation is referred to as a head array 31R.

In this regard, in consideration of the nonuse portions 26 of respectiveone ends of the first and second droplet ejection heads 21R and 22R, thefirst and second droplet ejection heads 21R and 22R are arranged so thatthe right end portion in FIG. 8 of the nozzle array in the first dropletejection head 21R and the left end portion in FIG. 8 of the nozzle arrayin the second droplet ejection head 22R overlap each other in thevicinity of the seam r, of the nozzle arrays when viewed from the Y axisdirection.

In a similar manner, the third droplet ejection head 23R and the fourthdroplet ejection head 24R are arranged in a consecutive manner in thefirst direction (that is, X axis direction) parallel to each of thenozzle arrays, and the two nozzle arrays of the third and fourth dropletejection heads 23R and 24R are arranged so that the nozzles 25 thereofare consecutive via a seam r₂ between the two adjacent nozzle arrays ofthe third and fourth droplet ejection heads 23R and 24R when viewed fromthe second direction (that is, Y axis direction) perpendicular to eachof the nozzle arrays (the first direction). In this case, the two nozzlearrays of the third and fourth droplet ejection heads 23R and 24Rfunction as a long nozzle array. In other words, a nozzle pitch at theseam r₂ when viewed from the Y axis direction is set to become a regularlength similar to a nozzle pitch in the nozzle array. The head arrayconstituted from the third and fourth droplet ejection heads 23R and 24Rarranged with such a positional relation is referred to as a head array32R.

In this regard, in consideration of the nonuse portions 26 of respectiveone ends of the third and fourth droplet ejection heads 23R and 24R, thethird and fourth droplet ejection heads 23R and 24R are arranged so thatthe right end portion in FIG. 8 of the nozzle array in the third dropletejection head 23R and the left end portion in FIG. 8 of the nozzle arrayin the fourth droplet ejection head 24R overlap each other in thevicinity of the seam r₂ of the nozzle arrays when viewed from the Y axisdirection.

The long nozzle array formed from the head array 31R described above andthe long nozzle array formed from the head array 32R described above arearranged by overlapping them so that the seams r₁ and r₂ are shiftedwith respect to each other in the X axis direction when viewed from theY axis direction. The droplet ejection apparatus 1 can eject the liquidmaterial 111R in the form of droplets onto one pixel 18R through thenozzles 25 of a plurality of different droplet ejection heads 2 (in thepresent embodiment, two droplet ejection heads 2) using such an overlap.

For example, in the case of the pixel 18R onto which the liquid material111R is ejected in the form of droplets using an area indicated as R₁ inFIG. 8 where the first and third droplet ejection heads 21R and 23R areoverlapped, as shown in FIG. 3, the droplets 91 ejected through thenozzles 25 of the first droplet ejection head 21R and the droplets 92ejected through the nozzles 25 of the third droplet ejection head 23Rare supplied thereto.

In this regard, in FIG. 3, although the position of the nozzles 25 inthe head array 31R (herein, the first droplet ejection head 21R) and theposition of the nozzles 25 in the head array 32R (herein, the thirddroplet ejection head 23R) are shifted with respect to each other in theX axis direction when viewed from the Y axis direction, the head arrays31R and 32R may be arranged so that the positions of the nozzles in eachof the head arrays 31R and 32R correspond with each other.

Although it is not shown in the drawings (in particular, in FIG. 3), inthe case of the pixel 18R onto which the liquid material 111R is ejectedin the form of droplets using an area indicated as R₂ in FIG. 8 wherethe first and fourth droplet ejection heads 21R and 24R are overlapped,the droplets ejected through the nozzles 25 of the first dropletejection head 21R and the droplets ejected through the nozzles 25 of thefourth droplet ejection head 24R are supplied thereto. Further, in thecase of the pixel 18R onto which the liquid material 111R is ejected inthe form of droplets using an area indicated as R₃ in FIG. 8 where thesecond and fourth droplet ejection heads 22R and 24R are overlapped, thedroplets ejected through the nozzles 25 of the second droplet ejectionhead 22R and the droplets ejected through the nozzles 25 of the fourthdroplet ejection head 24R are supplied thereto.

In this way, the droplet ejection apparatus 1 operates so that theliquid material 111R is ejected in the form of droplets onto one pixel18R through the nozzles 25 of the plurality of different dropletejection heads 2. Therefore, even in the case where there is a variation(error) among the amounts of ejection of the plurality of dropletejection heads 2, it is possible to prevent harmful color heterogeneityfrom being generated in a surface of a color filter substrate 10 to bemanufactured from the base 10A using the head unit 103 of the dropletejection apparatus 1. In other words, in contrast to the dropletejection apparatus 1 of the invention, in the case where the liquidmaterial 111R is supplied onto one pixel 18R through the nozzles 25 ofonly one droplet ejection head 2, variations of the amounts of ejectionof the droplet ejection heads 2 lead directly to a variation (error) ofthe amount of liquid material 111R to be supplied onto each of thepixels 18R, whereby color heterogeneity appears in the color filtersubstrate 10 strongly. On the other hand, in the droplet ejectionapparatus 1 of the invention, since the amount of liquid material 111Rto be supplied onto one pixel 18R becomes the average of the amounts ofejection of the nozzles 25 in the plurality of droplet ejection heads 2(in the present embodiment, two droplet ejection heads 2) overlapped ina scanning direction, it is possible to uniformize the amount of liquidmaterial 111R supplied onto each of the pixels 18R, whereby it ispossible to prevent the color heterogeneity from being generated.

Further, in the droplet ejection apparatus 1, the plurality of dropletejection heads 2 for ejecting the liquid material 111R in the form ofdroplets onto one same pixel 18R are arranged so that the nozzle arraysof the plurality of droplet ejection heads 2 are parallel to each otherin the X axis direction and each of the plurality of droplet ejectionheads 2 partially overlaps at least one of the other droplet ejectionheads 2 when viewed from the Y axis direction perpendicular to the Xaxis direction. In other words, in the area R₁ shown in FIG. 8, thefirst droplet ejection head 21R and the third droplet ejection head 23Rare shifted with respect to each other in the X axis direction. In thearea R₂ shown in FIG. 8, the first droplet ejection head 21R and thefourth droplet ejection head 24R are shifted with respect to each otherin the X axis direction. In the area R₃ shown in FIG. 8, the seconddroplet ejection head 22R and the fourth droplet ejection head 24R areshifted with respect to each other in the X axis direction. Thus, thehead unit 103 of the invention has the following advantages.

The droplet ejection heads 2 normally tend to mutually vary the amountof ejection of each of the nozzles 25 up and down along the nozzle arraybecause of the configuration thereof For example, there is a case wherethe amount of ejection in one nozzle 25 in the vicinity of the center ofthe nozzle array is relatively smaller, and the nearer both ends of thenozzle array, the more the amount of ejection in one nozzle 25 becomes.In such a case, in contrast to the head unit 103 of the invention, inthe case where the plurality of droplet ejection heads 2 for ejectingthe liquid material 111R in the form of droplets onto one same pixel 18R(that is, one ejection region) are aligned in the X axis direction,variations of the amounts of ejection of each nozzle 25 along the nozzlearrays in the plurality of droplet ejection heads 2 lead directly to avariation (error) of the amount of liquid material 111R to be suppliedonto each of the pixels 18R aligned in the X axis direction, wherebycolor heterogeneity strongly appears in a color filter substrate 10 tobe manufactured.

On the other hand, in the droplet ejection apparatus 1 of the invention,since the two droplet ejection heads 2 for ejecting the liquid material111R in the form of droplets onto the one same pixel 18R are shiftedwith respect to each other in the X axis direction, the position of onenozzle 25 through which a droplet of the liquid material 111R is ejectedonto one pixel 18R in the plurality of nozzles 25 of the nozzle array ofone droplet ejection head 2 is different from the position of one nozzle25 through which a droplet of the liquid material 11R is ejected ontothe one pixel 18R in the plurality of nozzles 25 of the nozzle array ofother droplet ejection head 2. Thus, the amount of ejection of such onenozzle 25 in the one droplet ejection head 2 tends to differ from theamount of ejection of such one nozzle 25 in the other droplet ejectionhead 2. The amount of the liquid material 11R to be supplied onto theone pixel 18R becomes the average of the amount of ejection of thecorresponding nozzle 25 in the two droplet ejection heads 2.

For this reasons, in the droplet ejection apparatus 1 of the invention,it is possible to compensate for the variation in the amount of ejectionof each nozzle 25 along the nozzle array by averaging the amounts ofejection thereof, and this makes it possible to uniformize the amount ofliquid material 111R supplied onto each of the pixels 18R. Therefore, itis possible to prevent the harmful color heterogeneity from beinggenerated in the color filter substrate 10 to be manufactured moresurely.

Further, in the droplet ejection apparatus 1, by constituting the headarray 31R from the first and second droplet ejection heads 21R and 22R,the nozzle arrays of the first and second droplet ejection heads 21R and22R function as a long nozzle array, while the nozzle arrays of thethird and fourth droplet ejection heads 23R and 24R function as a longnozzle array by constituting the head array 32R from the third andfourth droplet ejection heads 23R and 24R. Thus, it is possible toenlarge the entire ejection width W (that is, the length of the headunit 103 in the X axis direction) in which the liquid material 111R canbe ejected onto the base 10A through the nozzles 25 in the entire headunit 103. Therefore, it is possible to reduce the number of mainscanning movements of the head unit 103 with respect to the base 10Arequired to eject the liquid material 111R onto the entire base 10A. Inparticular, in the case where the width of the base 10A is smaller thanthe entire ejection width W, it is possible to eject the liquid material111R onto the whole of the base 10A by one main scanning movement.

Moreover, since the droplet ejection apparatus 1 is constructed so thatthe seam r₁ of the nozzle arrays in the head array 31R and the seam r₂of the nozzle arrays in the head array 32R are shifted with respect toeach other when viewed from the Y axis direction, the droplet ejectionapparatus 1 has the following advantages.

Color heterogeneity appears in the pixels 18R onto which the liquidmaterial 111R is supplied through the nozzles 25 in the vicinity of anyseams of two adjacent nozzle arrays more easily than the pixels 18Rprovided at the other positions. As the cause thereof, the difficulty incontrolling the amount of ejection of the nozzles 25 in the vicinity ofthe seam of the two adjacent nozzle arrays with high accuracy becausesuch nozzles 25 are positioned near both ends of each of the nozzlearrays, an error of the nozzle pitch at the seam, and the like may beconsidered. In the case where color heterogeneity due to such a seam ofnozzle arrays is generated, a so-called streak in which such colorheterogeneity extends along the scanning direction of the dropletejection heads 2 (that is, along the Y axis direction) like a line mayappear in a color filter substrate 10 to be manufactured.

In the case where the streak described above is generated in the colorfilter substrate 10 when the position of the seam r₁ of the nozzlearrays in the head array 31R corresponds with the position of the seamr₂ of the nozzle arrays in the head array 32R, such two streaks overlapin the color filter substrate 10 to be manufactured, whereby suchstreaks become conspicuous. On the other hand, since the dropletejection apparatus 1 is constructed so that the seam r₁ of the nozzlearrays in the head array 31R and the seam r₂ of the nozzle arrays in thehead array 32R are shifted with respect to each other when viewed fromthe Y axis direction, the two steaks are dispersed at the positions ofthe seams r₁ and r₂ in the color filter substrate 10 to be manufactured.Therefore, it is possible to make such a streak become inconspicuous.

Next, a description will be given for the positional relation of thefour droplet ejection heads 2 including first to fourth droplet ejectionheads 21G to 24G for ejecting the green liquid material 11G. Thepositional relation of the four droplet ejection heads 2 including thefirst to fourth droplet ejection heads 21G to 24G for ejecting the greenliquid material 111G is similar to the positional relation of the fourdroplet ejection heads 2 including the first to fourth droplet ejectionheads 21R to 24R for ejecting the red liquid material 111R. For thisreason, hereinafter, the description of such positional relation will besimplified.

The first droplet ejection head 21G and the second droplet ejection head22G are arranged in a consecutive manner in the X axis directionparallel to each of the nozzle arrays, and the two nozzle arrays of thefirst and second droplet ejection heads 21G and 22G are arranged so thatthe nozzles 25 thereof are consecutive via a seam g₁ between the twoadjacent nozzle arrays of the first and second droplet ejection heads21G and 22G when viewed from the Y axis direction perpendicular to eachof the nozzle arrays (that is, the X axis direction). In this case, thetwo nozzle arrays of the first and second droplet ejection heads 21G and22G function as a long nozzle array. The head array constituted from thefirst and second droplet ejection heads 21G and 22G arranged with such apositional relation is referred to as a head array 31G.

In a similar manner, the third droplet ejection head 23G and the fourthdroplet ejection head 24G are arranged in a consecutive manner in the Xaxis direction parallel to each of the nozzle arrays, and the two nozzlearrays of the third and fourth droplet ejection heads 23G and 24G arearranged so that the nozzles 25 thereof are consecutive via a seam g₂between the two adjacent nozzle arrays of the third and fourth dropletejection heads 23G and 24G when viewed from the Y axis directionperpendicular to each of the nozzle arrays (that is, the X axisdirection). In this case, the two nozzle arrays of the third and fourthdroplet ejection heads 23G and 24G function as a long nozzle array. Thehead array constituted from the third and fourth droplet ejection heads23G and 24G arranged with such a positional relation is referred to as ahead array 32G.

The long nozzle array formed from the head array 31G described above andthe long nozzle array formed from the head array 32G described above arearranged by overlapping them so that the seams g, and g₂ are shiftedwith respect to each other in the X axis direction when viewed from theY axis direction. The droplet ejection apparatus 1 can eject the liquidmaterial 111G in the form of droplets onto one pixel 18G through thenozzles 25 of a plurality of different droplet ejection heads 2 (in thepresent embodiment, two droplet ejection heads 2) using such an overlap.

In other words, in the case of the pixel 18G onto which the liquidmaterial 11G is ejected in the form of droplets using an area indicatedas G₁ in FIG. 8 where the first and third droplet ejection heads 21G and23G are overlapped, the droplets ejected through the nozzles 25 of thefirst droplet ejection head 21G and the droplets ejected through thenozzles 25 of the third droplet ejection head 23G are supplied thereto.

Further, in the case of the pixel 18G onto which the liquid material111G is ejected in the form of droplets using an area indicated as G₂ inFIG. 8 where the first and fourth droplet ejection heads 21G and 24G areoverlapped, the droplets ejected through the nozzles 25 of the firstdroplet ejection head 21G and the droplets ejected through the nozzles25 of the fourth droplet ejection head 24G are supplied thereto.Moreover, in the case of the pixel 18G onto which the liquid material111G is ejected in the form of droplets using an area indicated as G₃ inFIG. 8 where the second and fourth droplet ejection heads 22G and 24Gare overlapped, the droplets ejected through the nozzles 25 of thesecond droplet ejection head 22G and the droplets ejected through thenozzles 25 of the fourth droplet ejection head 24G are supplied thereto.

In this way, the droplet ejection apparatus 1 operates so that theliquid material 111G is ejected in the form of droplets onto one pixel18G through the nozzles 25 of the plurality of different dropletejection heads 2. Therefore, even in the case where there is a variation(error) among the amounts of ejection of the plurality of dropletejection heads 2, it is possible to prevent harmful color heterogeneityfrom being generated in a surface of a color filter substrate 10 to bemanufactured from the base 10A using the head unit 103 of the dropletejection apparatus 1. In other words, in contrast to the dropletejection apparatus 1 of the invention, in the case where the liquidmaterial 111G is supplied onto one pixel 18G through the nozzles 25 ofonly one droplet ejection head 2, variations of the amounts of ejectionof the droplet ejection heads 2 lead directly to a variation (error) ofthe amount of liquid material 111G to be supplied onto each of thepixels 18G, whereby color heterogeneity appears in the color filtersubstrate 10 strongly. On the other hand, in the droplet ejectionapparatus 1 of the invention, since the amount of liquid material 111Gto be supplied onto one pixel 18G becomes the average of the amounts ofejection of the nozzles 25 in the plurality of droplet ejection heads 2(in the present embodiment, two droplet ejection heads 2) overlapped ina scanning direction, it is possible to uniformize the amount of liquidmaterial 1111G supplied onto each of the pixels 18G, whereby it ispossible to prevent the color heterogeneity from being generated.

Further, in the droplet ejection apparatus 1, the plurality of dropletejection heads 2 for ejecting the liquid material 111G in the form ofdroplets onto one same pixel 18G are arranged so that the nozzle arraysof the plurality of droplet ejection heads 2 are parallel to each otherin the X axis direction and each of the plurality of droplet ejectionheads 2 partially overlaps at least one of the other droplet ejectionheads 2 when viewed from the Y axis direction perpendicular to the Xaxis direction. In other words, in the area G₁ shown in FIG. 8, thefirst droplet ejection head 21G and the third droplet ejection head 23Gare shifted with respect to each other in the X axis direction. In thearea G₂ shown in FIG. 8, the first droplet ejection head 21G and thefourth droplet ejection head 24G are shifted with respect to each otherin the X axis direction. In the area G₃ shown in FIG. 8, the seconddroplet ejection head 22G and the fourth droplet ejection head 24G areshifted with respect to each other in the X axis direction. Thus, thehead unit 103 of the invention has the following advantages.

The droplet ejection heads 2 normally tend to mutually vary the amountof ejection of each of the nozzles 25 up and down along the nozzle arraybecause of the configuration thereof. For example, there is a case wherethe amount of ejection in one nozzle 25 in the vicinity of the center ofthe nozzle array is relatively smaller, and the nearer both ends of thenozzle array, the more the amount of ejection in one nozzle 25 becomes.In such a case, in contrast to the head unit 103 of the invention, inthe case where the plurality of droplet ejection heads 2 for ejectingthe liquid material 111G in the form of droplets onto one same pixel 18G(that is, one ejection region) are aligned in the X axis direction,variations of the amounts of ejection of each nozzle 25 along the nozzlearrays in the plurality of droplet ejection heads 2 lead directly to avariation (error) of the amount of liquid material 111G to be suppliedonto each of the pixels 18G aligned in the X axis direction, wherebycolor heterogeneity strongly appears in a color filter substrate 10 tobe manufactured.

On the other hand, in the droplet ejection apparatus 1 of the invention,since the two droplet ejection heads 2 for ejecting the liquid material111G in the form of droplets onto the one same pixel 18G are shiftedwith respect to each other in the X axis direction, the position of onenozzle 25 through which a droplet of the liquid material 111G is ejectedonto one pixel 18G in the plurality of nozzles 25 of the nozzle array ofone droplet ejection head 2 is different from the position of one nozzle25 through which a droplet of the liquid material 111G is ejected ontothe one pixel 18G in the plurality of nozzles 25 of the nozzle array ofother droplet ejection head 2. Thus, the amount of ejection of such onenozzle 25 in the one droplet ejection head 2 tends to differ from theamount of ejection of such one nozzle 25 in the other droplet ejectionhead 2. The amount of the liquid material 111G to be supplied onto theone pixel 18G becomes the average of the amount of ejection of thecorresponding nozzle 25 in the two droplet ejection heads 2.

For this reasons, in the droplet ejection apparatus 1 of the invention,it is possible to compensate for the variation in the amount of ejectionof each nozzle 25 along the nozzle array by averaging the amounts ofejection thereof, and this makes it possible to uniformize the amount ofliquid material 111G supplied onto each of the pixels 18G. Therefore, itis possible to prevent the harmful color heterogeneity from beinggenerated in the color filter substrate 10 to be manufactured moresurely.

Further, in the droplet ejection apparatus 1, by constituting the headarray 31G from the first and second droplet ejection heads 21G and 22G,the nozzle arrays of the first and second droplet ejection heads 21G and22G function as a long nozzle array, while the nozzle arrays of thethird and fourth droplet ejection heads 23G and 24G function as a longnozzle array by constituting the head array 32G from the third andfourth droplet ejection heads 23G and 24G. Thus, it is possible toenlarge the entire ejection width W (that is, the length of the headunit 103 in the X axis direction) in which the liquid material 111G canbe ejected onto the base 10A through the nozzles 25 in the entire headunit 103. Therefore, it is possible to reduce the number of mainscanning movements of the head unit 103 with respect to the base 10Arequired to eject the liquid material 111G onto the entire base 10A. Inparticular, in the case where the width of the base 10A is smaller thanthe entire ejection width W, it is possible to eject the liquid material111G onto the whole of the base 10A by one main scanning movement.

Moreover, since the droplet ejection apparatus 1 is constructed so thatthe seam g₁ of the nozzle arrays in the head array 31G and the seam g₂of the nozzle arrays in the head array 32G are shifted with respect toeach other when viewed from the Y axis direction, the droplet ejectionapparatus 1 has the following advantages.

Color-heterogeneity appears in the pixels 18G onto which the liquidmaterial 111G is supplied through the nozzles 25 in the vicinity of anyseams of two adjacent nozzle arrays more easily than the pixels 18Gprovided at the other positions. As the cause thereof, the difficulty incontrolling the amount of ejection of the nozzles 25 in the vicinity ofthe seam of the two adjacent nozzle arrays with high accuracy becausesuch nozzles 25 are positioned near both ends of each of the nozzlearrays, an error of the nozzle pitch at the seam, and the like may beconsidered. In the case where color heterogeneity due to such a seam ofnozzle arrays is generated, a so-called streak in which such colorheterogeneity extends along the scanning direction of the dropletejection heads 2 (that is, along the Y axis direction) like a line mayappear in a color filter substrate 10 to be manufactured.

In the case where the streak described above is generated in the colorfilter substrate 10 when the position of the seam g₁ of the nozzlearrays in the head array 31G corresponds with the position of the seamg₂ of the nozzle arrays in the head array 32G, such two streaks overlapin the color filter substrate 10 to be manufactured, whereby suchstreaks become conspicuous. On the other hand, since the dropletejection apparatus 1 is constructed so that the seam g₁ of the nozzlearrays in the head array 31G and the seam g₂ of the nozzle arrays in thehead array 32G are shifted with respect to each other when viewed fromthe Y axis direction, the two steaks are dispersed at the positions ofthe seams g₁ and g₂ in the color filter substrate 10 to be manufactured.Therefore, it is possible to make such a streak become inconspicuous.

Next, a description will be given for the positional relation of thefour droplet ejection heads 2 including first to fourth droplet ejectionheads 21B to 24B for ejecting the blue liquid material 111B. Thepositional relation of the four droplet ejection heads 2 including thefirst to fourth droplet ejection heads 21B to 24B for ejecting the blueliquid material 111B is similar to the positional relation of the fourdroplet ejection heads 2 including the first to fourth droplet ejectionheads 21R to 24R for ejecting the red liquid material 111R. For thisreason, hereinafter, the description of such positional relation will besimplified.

The first droplet ejection head 21B and the second droplet ejection head22B are arranged in a consecutive manner in the X axis directionparallel to each of the nozzle arrays, and the two nozzle arrays of thefirst and second droplet ejection heads 21B and 22B are arranged so thatthe nozzles 25 thereof are consecutive via a seam b₁ between the twoadjacent nozzle arrays of the first and second droplet ejection heads21B and 22B when viewed from the Y axis direction perpendicular to eachof the nozzle arrays (that is, the X axis direction). In this case, thetwo nozzle arrays of the first and second droplet ejection heads 21B and22B function as a long nozzle array. The head array constituted from thefirst and second droplet ejection heads 21B and 22B arranged with such apositional relation is referred to as a head array 31B.

In a similar manner, the third droplet ejection head 23B and the fourthdroplet ejection head 24B are arranged in a consecutive manner in the Xaxis direction parallel to each of the nozzle arrays, and the two nozzlearrays of the third and fourth droplet ejection heads 23B and 24B arearranged so that the nozzles 25 thereof are consecutive via a seam b₂between the two adjacent nozzle arrays of the third and fourth dropletejection heads 23B and 24B when viewed from the Y axis directionperpendicular to each of the nozzle arrays (that is, the X axisdirection). In this case, the two nozzle arrays of the third and fourthdroplet ejection heads 23B and 24B function as a long nozzle array. Thehead array constituted from the third and fourth droplet ejection heads23B and 24B arranged with such a positional relation is referred to as ahead array 32B.

The long nozzle array formed from the head array 31B described above andthe long nozzle array formed from the head array 32B described above arearranged by overlapping them so that the seams b₁ and b₂ are shiftedwith respect to each other in the X axis direction when viewed from theY axis direction. The droplet ejection apparatus 1 can eject the liquidmaterial 111B in the form of droplets onto one pixel 18B through thenozzles 25 of a plurality of different droplet ejection heads 2 (in thepresent embodiment, two droplet ejection heads 2) using such an overlap.

In other words, in the case of the pixel 18B onto which the liquidmaterial 111B is ejected in the form of droplets using an area indicatedas B₁ in FIG. 8 where the first and third droplet ejection heads 21B and23B are overlapped, the droplets ejected through the nozzles 25 of thefirst droplet ejection head 21B and the droplets ejected through thenozzles 25 of the third droplet ejection head 23B are supplied thereto.

Further, in the case of the pixel 18B onto which the liquid material111B is ejected in the form of droplets using an area indicated as B₂ inFIG. 8 where the first and fourth droplet ejection heads 21B and 24B areoverlapped, the droplets ejected through the nozzles 25 of the firstdroplet ejection head 21B and the droplets ejected through the nozzles25 of the fourth droplet ejection head 24B are supplied thereto.Moreover, in the case of the pixel 18B onto which the liquid material111B is ejected in the form of droplets using an area indicated as B₃ inFIG. 8 where the second and fourth droplet ejection heads 22B and 24Bare overlapped, the droplets ejected through the nozzles 25 of thesecond droplet ejection head 22B and the droplets ejected through thenozzles 25 of the fourth droplet ejection head 24B are supplied thereto.

In this way, the droplet ejection apparatus 1 operates so that theliquid material 111B is ejected in the form of droplets onto one pixel18B through the nozzles 25 of the plurality of different dropletejection heads 2. Therefore, even in the case where there is a variation(error) among the amounts of ejection of the plurality of dropletejection heads 2, it is possible to prevent harmful color heterogeneityfrom being generated in a surface of a color filter substrate 10 to bemanufactured from the base 10A using the head unit 103 of the dropletejection apparatus 1. In other words, in contrast to the dropletejection apparatus 1 of the invention, in the case where the liquidmaterial 111B is supplied onto one pixel 18B through the nozzles 25 ofonly one droplet ejection head 2, variations of the amounts of ejectionof the droplet ejection heads 2 lead directly to a variation (error) ofthe amount of liquid material 111B to be supplied onto each of thepixels 18B, whereby color heterogeneity appears in the color filtersubstrate 10 strongly. On the other hand, in the droplet ejectionapparatus 1 of the invention, since the amount of liquid material 111Bto be supplied onto one pixel 18B becomes the average of the amounts ofejection of the nozzles 25 in the plurality of droplet ejection heads 2(in the present embodiment, two droplet ejection heads 2) overlapped ina scanning direction, it is possible to uniformize the amount of liquidmaterial 111B supplied onto each of the pixels 18B, whereby it ispossible to prevent the color heterogeneity from being generated.

Further, in the droplet ejection apparatus 1, the plurality of dropletejection heads 2 for ejecting the liquid material 111B in the form ofdroplets onto one same pixel 18B are arranged so that the nozzle arraysof the plurality of droplet ejection heads 2 are parallel to each otherin the X axis direction and each of the plurality of droplet ejectionheads 2 partially overlaps at least one of the other droplet ejectionheads 2 when viewed from the Y axis direction perpendicular to the Xaxis direction. In other words, in the area B, shown in FIG. 8, thefirst droplet ejection head 21B and the third droplet ejection head 23Bare shifted with respect to each other in the X axis direction. In thearea B₂ shown in FIG. 8, the first droplet ejection head 21B and thefourth droplet ejection head 24B are shifted with respect to each otherin the X axis direction. In the area B₃ shown in FIG. 8, the seconddroplet ejection head 22B and the fourth droplet ejection head 24B areshifted with respect to each other in the X axis direction. Thus, thehead unit 103 of the invention has the following advantages.

The droplet ejection heads 2 normally tend to mutually vary the amountof ejection of each of the nozzles 25 up and down along the nozzle arraybecause of the configuration thereof For example, there is a case wherethe amount of ejection in one nozzle 25 in the vicinity of the center ofthe nozzle array is relatively smaller, and the nearer both ends of thenozzle array, the more the amount of ejection in one nozzle 25 becomes.In such a case, in contrast to the head unit 103 of the invention, inthe case where the plurality of droplet ejection heads 2 for ejectingthe liquid material 111B in the form of droplets onto one same pixel 18B(that is, one ejection region) are aligned in the X axis direction,variations of the amounts of ejection of each nozzle 25 along the nozzlearrays in the plurality of droplet ejection heads 2 lead directly to avariation (error) of the amount of liquid material 111B to be suppliedonto each of the pixels 18B aligned in the X axis direction, wherebycolor heterogeneity strongly appears in a color filter substrate 10 tobe manufactured.

On the other hand, in the droplet ejection apparatus 1 of the invention,since the two droplet ejection heads 2 for ejecting the liquid material111B in the form of droplets onto the one same pixel 18B are shiftedwith respect to each other in the X axis direction, the position of onenozzle 25 through which a droplet of the liquid material 111B is ejectedonto one pixel 18B in the plurality of nozzles 25 of the nozzle array ofone droplet ejection head 2 is different from the position of one nozzle25 through which a droplet of the liquid material 11G is ejected ontothe one pixel 18G in the plurality of nozzles 25 of the nozzle array ofother droplet ejection head 2. Thus, the amount of ejection of such onenozzle 25 in the one droplet ejection head 2 tends to differ from theamount of ejection of such one nozzle 25 in the other droplet ejectionhead 2. The amount of the liquid material 111B to be supplied onto theone pixel 18B becomes the average of the amount of ejection of thecorresponding nozzle 25 in the two droplet ejection heads 2.

For this reasons, in the droplet ejection apparatus 1 of the invention,it is possible to compensate for the variation in the amount of ejectionof each nozzle 25 along the nozzle array by averaging the amounts ofejection thereof, and this makes it possible to uniformize the amount ofliquid material 111B supplied onto each of the pixels 18B. Therefore, itis possible to prevent the harmful color heterogeneity from beinggenerated in the color filter substrate 10 to be manufactured moresurely.

Further, in the droplet ejection apparatus 1, by constituting the headarray 31B from the first and second droplet ejection heads 21B and 22B,the nozzle arrays of the first and second droplet ejection heads 21B and22B function as a long nozzle array, while the nozzle arrays of thethird and fourth droplet ejection heads 23B and 24B function as a longnozzle array by constituting the head array 32B from the third andfourth droplet ejection heads 23B and 24B. Thus, it is possible toenlarge the entire ejection width W (that is, the length of the headunit 103 in the X axis direction) in which the liquid material 111B canbe ejected onto the base 10A through the nozzles 25 in the entire headunit 103. Therefore, it is possible to reduce the number of mainscanning movements of the head unit 103 with respect to the base 10Arequired to eject the liquid material 111B onto the entire base 10A. Inparticular, in the case where the width of the base 10A is smaller thanthe entire ejection width W, it is possible to eject the liquid material111B onto the whole of the base 10A by one main scanning movement.

Moreover, since the droplet ejection apparatus 1 is constructed so thatthe seam b₁ of the nozzle arrays in the head array 31B and the seam b₂Of the nozzle arrays in the head array 32B are shifted with respect toeach other when viewed from the Y axis direction, the droplet ejectionapparatus 1 has the following advantages.

Color heterogeneity appears in the pixels 18B onto which the liquidmaterial 111B is supplied through the nozzles 25 in the vicinity of anyseams of two adjacent nozzle arrays more easily than the pixels 18Bprovided at the other positions. As the cause thereof, the difficulty incontrolling the amount of ejection of the nozzles 25 in the vicinity ofthe seam of the two adjacent nozzle arrays with high accuracy becausesuch nozzles 25 are positioned near both ends of each of the nozzlearrays, an error of the nozzle pitch at the seam, and the like may beconsidered. In the case where color heterogeneity due to such a seam ofnozzle arrays is generated, a so-called streak in which such colorheterogeneity extends along the scanning direction of the dropletejection heads 2 (that is, along the Y axis direction) like a line mayappear in a color filter substrate 10 to be manufactured.

In the case where the streak described above is generated in the colorfilter substrate 10 when the position of the seam b₁ of the nozzlearrays in the head array 31B corresponds with the position of the seamb₂ of the nozzle arrays in the head array 32B, such two streaks overlapin the color filter substrate 10 to be manufactured, whereby suchstreaks become conspicuous. On the other hand, since the dropletejection apparatus 1 is constructed so that the seam b₁ of the nozzlearrays in the head array 31B and the seam b₂ Of the nozzle arrays in thehead array 32B are shifted with respect to each other when viewed fromthe Y axis direction, the two steaks are dispersed at the positions ofthe seams b₁ and b₂ in the color filter substrate 10 to be manufactured.Therefore, it is possible to make such a streak become inconspicuous.

In such a head unit 103, the two long nozzle array respectively formedfrom the head arrays 31R and 32R for ejecting the red liquid material111R, the two long nozzle array respectively formed from the head arrays31G and 32G for ejecting the green liquid material 11G, and the two longnozzle array respectively formed from the head arrays 31B and 32B forejecting the blue liquid material 111B are arranged so as to beoverlapped with respect to each other when viewed from the Y axisdirection. This makes it possible to respectively supply the red, greenand blue liquid materials 111R, 111G and 111B onto the pixels 18R, 18Gand 18B in the entire ejection width W once by carrying out the scanningmovement of the head unit 103 with the base 10A.

Further, in the droplet ejection apparatus 1, the seams r₁ and r₂ of thenozzle arrays in the head array 31R and 32R for ejecting the red liquidmaterial 111R, the seams g₁ and g₂ of the nozzle arrays in the headarray 31G and 32G for ejecting the red liquid material 111G, and theseams b₁ and b₂ of the nozzle arrays in the head array 31B and 32B forejecting the red liquid material 111B are arranged so as to be shiftedwhen viewed from the Y axis direction.

Thus, in the color filter substrate 10 to be manufactured, the streakthat may be generated on any red pixels 18R, the streak that may begenerated on any green pixels 18G, the streak that may be generated onany blue pixels 18B can be dispersed with respect to each other.Therefore, it is possible to prevent such streaks from becomingconspicuous more surely. In particular, in the present embodiment, sincethe positions of the seams r₂, g₂, b₂, r₁, g₁, and b₁ of the nozzlearrays are positioned at even intervals when viewed from the Y axisdirection, it is possible to disperse the streaks regularly even in thecase where the streaks somewhat become conspicuous. Therefore, it ispossible to make such streaks become inconspicuous.

FIG. 9 is a plan view which schematically shows another example of theconfiguration of the head unit 103′ in the droplet ejection apparatus Iof the invention. Four droplet ejection heads 51, 52, 53 and 54 areprovided in the head unit 103′ shown in FIG. 9. Each of the dropletejection heads 51, 52, 53 and 54 includes a plurality of nozzle arrays(in the present embodiment, 12 nozzle arrays) which are arranged in aside by side relation in the Y axis direction so that both ends of the12 nozzle arrays in each of the plurality of droplet ejection heads 51,52, 53 and 54 are aligned when viewed from the Y axis direction. Thus,the 48 nozzle arrays of the four droplet ejection heads 51, 52, 53 and54 are provided in the head unit 103′. Each of the droplet ejectionheads 51, 52, 53 and 54 are arranged in the similar manner to those inthe head unit 103 described above (see FIG. 8). In this regard, forsimplification, each of the droplet ejection heads 51, 52, 53 and 54 areindicated as a simple rectangle in FIG. 9.

The droplet ejection head 51 and the droplet ejection head 52 arearranged in a consecutive manner in the X axis direction parallel toeach of the nozzle arrays, and the 24 nozzle arrays of the dropletejection heads 51 and 52 are arranged so that the nozzles 25 thereof areconsecutive via a seam j₁ between the two adjacent droplet ejectionheads 51 and 52 when viewed from the Y axis direction perpendicular toeach of the nozzle arrays. In this case, the two droplet ejection heads51 and 52 function as a head group array 61.

In a similar manner, the droplet ejection head 53 and the dropletejection head 54 are arranged in a consecutive manner in the X axisdirection parallel to each of the nozzle arrays, and the 24 nozzlearrays of the droplet ejection heads 53 and 54 are arranged so that thenozzles 25 thereof are consecutive via a seam j₂ between the twoadjacent droplet ejection heads 51 and 52 when viewed from the Y axisdirection perpendicular to each of the nozzle arrays. In this case, thetwo droplet ejection heads 53 and 54 function as a head group array 62.The head group array 61 and the head group array 62 described above arearranged by overlapping them so that the seams j₁ and j₂ are shiftedwith respect to each other in the X axis direction when viewed from theY axis direction.

In the droplet ejection apparatus I provided with such a head unit 103′,the liquid material 111 ejected from the two droplet ejection heads(that is, the two droplet ejection heads 51 and 53, 51 and 54, or 53 and54) is supplied onto each of the pixels 18R, 18G or 18B. This makes itpossible to further uniformize the amount of the liquid material 111 tobe supplied onto each of the pixels 18R, 18G or 18B at any position ofthe base 10A. Therefore, it is possible to prevent color heterogeneityfrom being generated in a surface of a color filter substrate 10 to bemanufactured more surely.

Further, since the ejection width W₁ of the droplet ejection head 51 andthe ejection width W₂ of the droplet ejection head 52 function of beinglinked and the ejection width W₃ of the droplet ejection head 53 and theejection width W₄ of the droplet ejection head 54 function of beinglinked, it is possible to enlarge the length of the head unit 103′ inthe X axis direction (that is, the entire ejection width W in FIG. 9) inwhich the liquid material 111 can be ejected onto the base 10A throughthe nozzles 25 in the entire head unit 103′.

Moreover, since the droplet ejection apparatus 1 of the presentembodiment is constructed so that the seam j₁ of the nozzle arrays inthe head group array 61 and the seam j₂ of the nozzle arrays in the headgroup array 62 are shifted with respect to each other when viewed fromthe Y axis direction, the steak that may be generated due to the seam j₁and the steak that may be generated due to the seam j₂ can be dispersedat separate points in the color filter substrate 10 to be manufactured.Therefore, it is possible to prevent the streaks from becomingconspicuous more surely.

The invention that has been described above can be applied to not onlythe case of manufacturing the color filter substrate 10 but also thecase of manufacturing other type of image display apparatus such as anelectroluminescence display.

FIG. 10 is a schematic cross-sectional view which shows a method ofmanufacturing an organic electroluminescence display 30. Hereinafter, anexplanation will be given for the case of manufacturing the organicelectroluminescence display 30 using the invention; however, differencesbetween the case of manufacturing the color filter substrate 10described above and the case of manufacturing the organicelectroluminescence display 30 are chiefly described, and thedescription of the similar explanations is omitted.

A base 30A shown in FIG. 10 is a substrate used for manufacturing anorganic electro-luminescence display 30. The base 30A has a plurality ofpixels (that is, a plurality of ejection regions) 38R, 38G and 38Barranged thereon in a matrix manner.

More specifically, the base 30A includes a supporting substrate 32, acircuit element layer 34 formed on the supporting substrate 32, aplurality of pixel electrodes 36 formed on the circuit element layer 34,and a plurality of banks 40 formed between the adjacent two of theplurality of pixel electrodes 36. The supporting substrate 32 has lightpermeability with respect to visible light (optical wavelength), such asa glass substrate. Each of the plurality of pixel electrodes 36 also haslight permeability with respect to visible light (optical wavelength),such as an ITO (Indium-Tin Oxide) electrode. Further, the plurality ofpixel electrodes 36 are arranged on the circuit element layer 34 in amatrix manner, and each of the pixel electrodes 36 defines a pixel. Eachof the banks 40 has a lattice-like structure, and each of the pluralityof pixel electrodes 36 is surrounded with predetermined banks 40.Moreover, the banks 40 are constituted from inorganic banks 40A formedon the circuit element layer 34, and organic banks 40B positioned on theinorganic banks 40A.

The circuit element layer 34 is a layer provided with: a plurality ofscanning electrodes each extending toward a predetermined direction onthe supporting substrate 32; an insulating film 42 formed so as to coverthe plurality of scanning electrodes; a plurality of signal electrodesprovided on the insulating film 42 and each extending toward a directionperpendicular to the predetermined direction toward which each of theplurality of scanning electrodes extends; a plurality of switchingelements 44 each provided in the vicinity of intersection point betweenthe scanning electrode and the signal electrode; and a plurality ofinterlayer insulating films 45 formed so as to cover the plurality ofswitching elements 44 such as polyimide. A gate electrode 44G and asource electrode 44S of each of the switching elements 44 areelectrically connected to the corresponding scanning electrode and thecorresponding signal electrode, respectively. The plurality of pixelelectrodes 36 are positioned on the interlayer insulating film 45. Aplurality of through-holes 44V are provided at portions corresponding todrain electrodes 44D of the switching elements 44, and the switchingelements 44 are electrically connected to the corresponding pixelelectrodes 36 via the through-holes 44V, respectively. Further, theswitching elements 44 are provided at the positions corresponding to thebanks 44, respectively. In other words, when viewed from the upper sidein FIG. 10, each of the plurality of switching elements 44 is positionedso as to be covered with the corresponding bank 40.

Concave portions each defined by the pixel electrode 36 and thecorresponding banks 40 correspond to the pixels 38R, 38G and 38B,respectively. The pixel 38R is a region in which a luminous layer 211FRthrough which light having a wavelength within a red wavelength regionis emitted is to be formed. The pixel 38G is a region in which aluminous layer 211FG through which light having a wavelength within agreen wavelength region is emitted is to be formed. The pixel 38B is aregion in which a luminous layer 211FB through which light having awavelength within a blue wavelength region is emitted is to be formed.

It is possible to manufacture such a base 30A using a known film formingtechnology and a patterning technology.

First, the base 30A is made to become lyophilic by means of an oxygenplasma process under atmospheric pressure. The surface of the pixelelectrodes 36, the surface of the inorganic banks 40A and the surface ofthe organic banks 40B in the pixels 38R, 38G and 38B, each of which isdefined by the pixel electrodes 36 and the banks 40, tend to take onlyophilic by this process. Further, a plasma process using CF₄ as aprocess gas is then carried out to the base 30A. By the plasma processusing CF₄, the surface of the organic banks 40B in each of the concaveportions is fluorinated, and the surface of the organic banks 40B tendsto take on non-lyophilic by this process. In this regard, by the plasmaprocess using CF₄, the surface of the pixel electrodes 36 and thesurface of the inorganic banks 40A that have taken on lyophilicpreviously lose the lyophilic slightly. However, even so, these surfacescan maintain lyophilic.

In this regard, in accordance with the material of the pixel electrodes36, the material of the inorganic banks 40A, and the material of theorganic banks 40B, the surface of each of the concave portions may takeon desired lyophilic and non-lyophilic without the surface treatmentdescribed above. In such a case, it is no need for the surface to besubjected to the surface treatment described above.

Further, corresponding hole transport layers 37R, 37G and 37B may beformed on each of the plurality of pixel electrodes 36 thus subjected tothe surface treatment. In the case where the hole transport layers 37R,37G and 37B are respectively positioned between the pixel electrodes 36and luminous layers 211FR, 211FG and 211FB, it is possible to improveluminous efficiency of the electro-luminescence display.

As shown in FIGS. 10( a) to 10(c), liquid materials 211R, 211G and 211Bare respectively supplied onto the base 30A on which the pixels 38R, 38Gand 38B are formed as described above in the similar to the case of thecolor filter substrate 10 described above using the droplet ejectionapparatus 1 of the invention. In this case, the liquid material 211Rincludes a red organic luminescent material, the liquid material 211Gincludes a green organic luminescent material, and the liquid material211B includes a blue luminescent material.

The base 30A is then transferred into the drying apparatus. Luminouslayers 211FR, 211FG and 211FB are obtained on each of the pixels 38R,38G and 38B by drying the liquid materials 211R, 211G and 211B suppliedonto each of the pixels 38R, 38G and 38B.

Next, counter electrodes 46 are formed so as to cover the luminouslayers 211FR, 211FG and 211FB and the banks 40. Each of the counterelectrodes 46 functions as a negative electrode.

Subsequently, by joining a sealing substrate 48 to the base 30A withtheir peripheral portions, the organic electro-luminescence display 30shown in FIG. 10( d) is obtained. In this regard, an inert gas isencapsulated between the sealing substrate 48 and the base 30A.

In the organic electro-luminescence display 30, light emitted from theluminous layers 211FR, 211FG and 211FB is emitted to outside through thepixel electrodes 36, the circuit element layers 34 and the supportingsubstrate 32. An organic electro-luminescence display in which light isemitted through the circuit element layer 34 in this manner is called asa bottom emission type display.

Although the cases where the invention is applied to a method ofmanufacturing a liquid crystal display (color filter substrate) and anorganic electro-luminescence display have been described based on thepreferred embodiment shown in the drawings, it should be noted that theinvention is not limited to the embodiment described above. For example,it is possible to apply the invention to a method of manufacturing aback substrate of a plasma display, or an image display provided withelectron emission elements (which is also referred as to a SED(Surface-Conduction Electron-Emitter Display) or a FED (Field EmissionDisplay)).

Embodiment of Electronic Device

An image display apparatus 1000 such as a liquid crystal displayprovided with the color filter substrate 10 manufactured using themethod described above, and the organic electro-luminescence displaymanufactured using the method described above (that is, an electronicapparatus of the invention) can be utilized as a display portion of eachof various types of electronic apparatuses.

FIG. 11 is a perspective view which shows a structure of a mobile (orlaptop type) personal computer 1100 to which an electronic apparatus ofthe invention is applied. Referring to FIG. 11, the personal computer1100 is provided with a body 1104 having a keyboard 1102, and a displayunit 1106. The display unit 1106 is rotatably supported on the body 1104via a hinge portion. In this personal computer 1100, the display unit1106 is provided with the image display apparatus 1000 described above.

FIG. 12 is a perspective view which shows a structure of a portablephone (including a personal handy phone system) 1200 to which anelectronic apparatus of the invention is applied. Referring to FIG. 12,the portable phone 1200 is provided with a plurality of buttons 1202, anearpiece 1204, a mouthpiece 1206, and a display portion. The displayportion is constituted from the image display apparatus 1000 describedabove.

FIG. 13 is a perspective view which shows a structure of a digital stillcamera 1300 to which an electronic apparatus of the invention isapplied. In this drawing, connection of the digital still camera toexternal equipments thereof is schematically shown. A normal cameraexposes a silver salt photographic film on the basis of an optical imageof a subject, while the digital still camera 1300 generates an imagingsignal (image signal) by photoelectrically converting an optical imageof a subject into the imaging signal with imaging device such as acharge coupled device (CCD).

The image display apparatus 1000 described above is provided as adisplay portion on the back surface of a case (body) 1302 in the digitalstill camera 1300. The image display apparatus 1000 displays an image inresponse to an imaging signal outputted by the CCD, and serves as afinder for displaying the subject as an electronic image. A circuitboard 1308 is placed inside the case 1302. A memory capable of storingsuch an imaging signal is placed on the circuit board 1308.

Further, a light receiving unit 1304 including an optical lens (imagingoptical system), the CCD and the like is provided in the front surfaceside of the case 1302. When a photographer confirms an image of asubject displayed on the display portion (that is, the image displayapparatus 1000), and pushes a shutter button 1306, an imaging signal ofthe CCD at the time is transferred to the memory of the circuit board1308 and stored in this memory.

Further, a video signal output terminal 1312 and an input/outputterminal 1314 for data communication are provided on the side surface ofthe case 1302 in the digital still camera 1300. As shown in FIG. 13, atelevision monitor 1430 and a personal computer 1440 are respectivelyconnected to the video signal output terminal 1312 and the input/outputterminal 1314 for data communication if needed. Moreover, the imagingsignal stored in the memory of the circuit board 1308 is outputted tothe television monitor 1430 or the personal computer 1440 by means of apredetermined operation.

In this regard, the electronic apparatus of the invention can besuitably used in (or applied to), for example, televisions, videocameras, view finder type or monitor direct view type videotaperecorders, laptop type personal computers, car navigation devices,pagers, electronic notebooks (including those having communicationfunctions), electronic dictionaries, pocket calculators, electronic gamedevices, word processors, work stations, television telephones,television monitors for crime prevention, electronic binoculars, POS(point-of-sale) terminals, apparatuses with touch panel (for example,cash dispensers in a financial institutions, automatic ticket vendingmachines), medical devices (electronic thermometers, blood pressuremeters, blood sugar meters, electrocardiogram displaying devices,ultrasound diagnostic devices, displays for endoscopes, for example),fish finders, various measurement devices, gauges (gauges for vehicles,airplanes, ships and the like, for example), flight simulators, anyother types of monitors, projection type displays such as projectors andthe like, in addition to the personal computer (mobile personalcomputer) 1100 shown in FIG. 19, the portable phone 1200 shown in FIG.20 and the digital still camera 1300 shown in FIG. 21.

The head unit for use in a droplet ejection apparatus, the dropletejection apparatus, the method of manufacturing a panel from a base, theimage display apparatus and the electronic apparatus according to theinvention have been described based on the embodiment shown in thedrawings, but it should be noted that the invention is not limited tothe embodiment. Respective portions of the head unit, the dropletejection apparatus, and the electronic apparatus according to theinvention can be replaced with an arbitrary arrangement capable offunctioning in the same manner. Further, any other arbitrary componentmay be added to the head unit, the droplet ejection apparatus, and theelectronic apparatus according to the invention.

1. A head unit for use in a droplet ejection apparatus, the head unitbeing provided with a plurality of droplet ejection heads for ejecting aliquid material of a predetermined color onto a base in the form ofdroplets, wherein the plurality of droplet ejection heads comprise atleast a first droplet ejection head, a second droplet ejection head, athird droplet ejection head and a fourth droplet ejection head forejecting the liquid material of the predetermined color, each of thedroplet ejection heads including at least one nozzle array constitutedfrom a plurality of nozzles linearly aligned, the liquid material beingadapted to be ejected through the plurality of nozzles of each of theplurality of droplet ejection heads in the form of droplets, wherein thefirst droplet ejection head and the second droplet ejection headconstitute a first set, and the third droplet ejection head and thefourth droplet ejection head constitute a second set, wherein in thefirst set the first droplet ejection head and the second dropletejection head are arranged along a first direction parallel to each ofthe nozzle arrays so that the nozzles of the nozzle array of the firstdroplet ejection head and the nozzles of the nozzle array of the seconddroplet ejection head constitute a first consecutive long nozzle arraywhen viewed from a second direction perpendicular to the firstdirection, and in the second set the third droplet ejection head and thefourth droplet ejection head are arranged along the first direction sothat the nozzles of the nozzle array of the third droplet ejection headand the nozzles of the nozzle array of the fourth droplet ejection headconstitute a second consecutive long nozzle array when viewed from thesecond direction, and the first set and the second set partially overlapeach other when viewed from the second direction, wherein the first setand the second set are arranged so that the second droplet ejection headis arranged between the third droplet ejection head and the fourthdroplet ejection head when viewed from the first direction, and thethird droplet ejection head is arranged between the first dropletejection head and the second droplet ejection head when viewed from thefirst direction, wherein all the plurality of droplet ejection heads forejecting the liquid material of the same color eject the liquid materialonto a predetermined region of the base in the form of droplets.
 2. Thehead unit as claimed in claim 1, wherein the liquid material is red,green or blue color.
 3. A droplet ejection apparatus for supplying atleast three kind of liquid materials onto a base in the form ofdroplets, the each of at least three kind of liquid materials having apredetermined color, the apparatus comprising: the head unit includingat least three groups each having the first to fourth droplet ejectionheads defined by claim 1; a stage having two major surfaces, one of thetwo major surfaces of the stage facing the plurality of droplet ejectionheads of the head unit, and the base being supported on the one majorsurface of the stage; a moving mechanism for mutually moving the stagewith respect to the head unit; and a control unit for controllingoperation of the head unit and the moving mechanism so that each of theplurality of the droplet ejection heads of the head unit ejects dropletsof the liquid material onto the base while mutually moving the stagewith respect to the head unit.
 4. The droplet ejection apparatus asclaimed in claim 3, wherein the base is a base material formanufacturing a color filter substrate for a liquid-crystal display, andthe at least three kind of liquid materials are inks for forming filterlayers of the color filter substrate.
 5. The droplet ejection apparatusas claimed in claim 3, wherein the base is a base material formanufacturing an electroluminescence display, and the at least threekind of liquid materials include luminescent materials for manufacturingthe electroluminescence display.
 6. A method of manufacturing a panelfrom a base using the droplet ejection apparatus defined by claim 3, themethod comprising the steps of: preparing the base; and supplying eachof the at least three kind of liquid materials of a predetermined coloronto the base in the form of droplets by ejecting the droplets by meansof the head unit while mutually moving the base with respect to the headunit.
 7. The method as claimed in claim 6, wherein the base is a basematerial for manufacturing a color filter substrate for a liquid-crystaldisplay, and the at least three kind of liquid materials are inks forforming filter layers of the color filter substrate.
 8. The method asclaimed in claim 6, wherein the base is a base material formanufacturing an electroluminescence display, and the at least threekind of liquid materials include luminescent materials for manufacturingthe electroluminescence display.
 9. An image display apparatuscomprising the panel manufactured using the method defined by claim 6.10. An electronic apparatus comprising the image display apparatusdefined by claim 9.